Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
J. Laconte, D. Flandre, J. -P. Raskin
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration - New York Springer US 2006
978-0-387-28843-7
Electronics and Microelectronics, Instrumentation; Circuits and Systems; Solid State Physics
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration - New York Springer US 2006
978-0-387-28843-7
Electronics and Microelectronics, Instrumentation; Circuits and Systems; Solid State Physics