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Multi-Wafer Rotating MEMS Machines

Jeffrey Lang

Multi-Wafer Rotating MEMS Machines - New York Springer US 2010 - MEMS Reference Shelf .

ISBN: 978-0-387-77747-4

Subjects--Topical Terms:
Electronics and Microelectronics, Instrumentation; Energy Technology; Circuits and Systems; Electrical Engineering; Energy, general

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