Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology Vol-I : solid state physics fluidics and analytical techniques in micro and nanotechnology 

 - 3rd ed. 
 - Boca Raton  CRC Press  2012 
 - xiii, 641 
<br/><br/><label>ISBN: </label>9781420055115 
<br/><br/><label>Subjects--Topical Terms: </label><br/>microfabrication,nanotechnology,Vol-I,solid,physics,fluidics,analytical,techniques,micro,nanotechnology
<br/><br/><label>Dewey Class. No.: </label>621.38152  MAD.1;1  R