TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology Vol-I : solid state physics fluidics and analytical techniques in micro and nanotechnology
SN  - 9781420055115
U1  - 621.38152  MAD.1;1  R 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - microfabrication,nanotechnology,Vol-I,solid,physics,fluidics,analytical,techniques,micro,nanotechnology
ER  -