<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>00613nam a2200169Ia 4500</leader>
  <controlfield tag="005">20250521142451.0</controlfield>
  <controlfield tag="008">231217s9999    xx            000 0 und d</controlfield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">9781420055115</subfield>
  </datafield>
  <datafield tag="082" ind1=" " ind2=" ">
    <subfield code="a">621.38152  MAD.2;1  R</subfield>
  </datafield>
  <datafield tag="100" ind1=" " ind2=" ">
    <subfield code="a">Madou, Marc J.</subfield>
  </datafield>
  <datafield tag="245" ind1=" " ind2="0">
    <subfield code="a">Fundamentals of microfabrication and nanotechnology Vol-II : manufacturing techniques for microfabrication and nanotechnology</subfield>
  </datafield>
  <datafield tag="250" ind1=" " ind2=" ">
    <subfield code="a">3rd ed.</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="c">2012</subfield>
    <subfield code="b">CRC Press</subfield>
    <subfield code="a">Boca Raton</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">xiii, 641</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2=" ">
    <subfield code="a">microfabrication,nanotechnology,Vol-I,solid,physics,fluidics,analytical,techniques,micro,nanotechnology</subfield>
  </datafield>
  <datafield tag="942" ind1=" " ind2=" ">
    <subfield code="c">AA</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="c">193098</subfield>
    <subfield code="d">193098</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="r">2024-01-26 00:00:00</subfield>
    <subfield code="l">0</subfield>
    <subfield code="o">621.38152  MAD.2;1  R</subfield>
    <subfield code="p">79865</subfield>
    <subfield code="W">25</subfield>
    <subfield code="v">3160.13</subfield>
    <subfield code="w">2024-01-26</subfield>
    <subfield code="y">AA</subfield>
    <subfield code="1">0</subfield>
    <subfield code="4">0</subfield>
    <subfield code="7">0</subfield>
    <subfield code="8">CL</subfield>
    <subfield code="0">0</subfield>
    <subfield code="K">BR-118</subfield>
    <subfield code="L">08/12/2016</subfield>
    <subfield code="a">ML</subfield>
    <subfield code="b">ML</subfield>
    <subfield code="c">CL</subfield>
    <subfield code="d">2011-11-03</subfield>
    <subfield code="e">Royal Biblioman</subfield>
    <subfield code="g">53.00</subfield>
    <subfield code="E">ME/PG</subfield>
    <subfield code="G">POUND</subfield>
    <subfield code="F">79.5</subfield>
    <subfield code="V">13.25</subfield>
    <subfield code="U">Rupees</subfield>
  </datafield>
</record>
