Thomas M. Adams, Richard A. Layton <br/><br/>
Introductory MEMS 

 - New York  Springer US  2010 
<br/><br/><label>ISBN: </label>978-0-387-09511-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and Microelectronics, Instrumentation; Circuits and Systems; Mechanics; Surfaces and Interfaces, Thin Films; Continuum Mechanics and Mechanics of Materials