TY  - BOOK
AU  - Thomas M. Adams, Richard A. Layton
TI  - Introductory MEMS
SN  - 978-0-387-09511-0
PY  - 2010///
CY  - New York
PB  - Springer US
KW  - Electronics and Microelectronics, Instrumentation; Circuits and Systems; Mechanics; Surfaces and Interfaces, Thin Films; Continuum Mechanics and Mechanics of Materials
ER  -