TY  - BOOK
AU  - J. Laconte, D. Flandre, J. -P. Raskin
TI  - Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
SN  - 978-0-387-28843-7
PY  - 2006///
CY  - New York
PB  - Springer US
KW  - Electronics and Microelectronics, Instrumentation; Circuits and Systems; Solid State Physics
ER  -