Jeffrey Lang <br/><br/>
Multi-Wafer Rotating MEMS Machines 

 - New York  Springer US  2010 
 - MEMS Reference Shelf .
<br/><br/><label>ISBN: </label>978-0-387-77747-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and Microelectronics, Instrumentation; Energy Technology; Circuits and Systems; Electrical Engineering; Energy, general