TY  - BOOK
AU  - Jeffrey Lang
TI  - Multi-Wafer Rotating MEMS Machines
SN  - 978-0-387-77747-4
PY  - 2010///
CY  - New York
PB  - Springer US
KW  - Electronics and Microelectronics, Instrumentation; Energy Technology; Circuits and Systems; Electrical Engineering; Energy, general
ER  -