TY  - BOOK
AU  - G. Q. Zhang, W. D. Driel, X. J. Fan
TI  - Mechanics of Microelectronics
SN  - 978-1-4020-4935-4
PY  - 2006///
CY  - New York
PB  - Springer Netherlands
KW  - Mechanical Engineering; Computational Intelligence
ER  -