Johan Liu, Olli Salmela, Jussi Sarkka, James E. Morris, Per-Erik Tegehall, Cristina Andersson <br/><br/>
Reliability of Microtechnology 

 - New York  Springer US  2011 
<br/><br/><label>ISBN: </label>978-1-4419-5760-3 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and Microelectronics, Instrumentation; Optical and Electronic Materials; Quality Control, Reliability, Safety and Risk; Nanotechnology and Microengineering