Jason J. Gorman, Benjamin Shapiro <br/><br/>
Feedback Control of MEMS to Atoms 

 - New York  Springer US  2012 
<br/><br/><label>ISBN: </label>978-1-4419-5832-7 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Control, Robotics, Mechatronics; Electronics and Microelectronics, Instrumentation; Vibration, Dynamical Systems, Control; Nanotechnology