00435nam a2200109Ia 4500008004100000020002200041041001200063100003800075245003800113260003200151650014200183231221s9999    xx            000 0 und d  a978-1-4419-5832-7  aEnglish  aJason J. Gorman, Benjamin Shapiro 0aFeedback Control of MEMS to Atoms  c2012bSpringer USaNew York  aControl, Robotics, Mechatronics; Electronics and Microelectronics, Instrumentation; Vibration, Dynamical Systems, Control; Nanotechnology