TY - BOOK AU - Jason J. Gorman, Benjamin Shapiro TI - Feedback Control of MEMS to Atoms SN - 978-1-4419-5832-7 PY - 2012/// CY - New York PB - Springer US KW - Control, Robotics, Mechatronics; Electronics and Microelectronics, Instrumentation; Vibration, Dynamical Systems, Control; Nanotechnology ER -