Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea <br/><br/>
MEMS Reliability 

 - New York  Springer US  2011 
 - MEMS Reference Shelf .
<br/><br/><label>ISBN: </label>978-1-4419-6018-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and Microelectronics, Instrumentation