00388nam a2200121Ia 4500008004100000020002200041041001200063100005900075245002100134260003200155440002500187650005400212231221s9999    xx            000 0 und d  a978-1-4419-6018-4  aEnglish  aAllyson L. Hartzell, Mark G. da Silva, Herbert R. Shea 0aMEMS Reliability  c2011bSpringer USaNew York  aMEMS Reference Shelf  aElectronics and Microelectronics, Instrumentation