TY  - BOOK
AU  - Tom Proulx
TI  - MEMS and Nanotechnology, Volume 4
SN  - 978-1-4614-0210-7
PY  - 2011///
CY  - New York
PB  - Springer New York
KW  - Nanotechnology and Microengineering; Mechatronics; Nanotechnology
ER  -