TY - BOOK AU - Simon Li, Yue Fu TI - 3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics SN - 978-1-4614-0481-1 PY - 2012/// CY - New York PB - Springer New York KW - Circuits and Systems; Computer-Aided Engineering (CAD, CAE) and Design ER -