TY  - BOOK
AU  - Gordon A. Shaw, Barton C. Prorok, LaVern A. Starman
TI  - MEMS and Nanotechnology, Volume 6
SN  - 978-1-4614-4436-7
PY  - 2013///
CY  - New York
PB  - Springer New York
KW  - Nanotechnology and Microengineering; Theoretical and Applied Mechanics; Nanotechnology
ER  -