TY - BOOK AU - Fumihiko Kimura, Kenichiro Horio TI - Towards Synthesis of Micro-/Nano-systems SN - 978-1-84628-559-2 PY - 2007/// CY - New York PB - Springer London KW - Manufacturing, Machines, Tools; Computer-Aided Engineering (CAD, CAE) and Design; Industrial and Production Engineering; Operating Procedures, Materials Treatment ER -