Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink <br/><br/>
Fast Simulation of Electro-Thermal MEMS 

 - New York  Springer Berlin Heidelberg  2007 
<br/><br/><label>ISBN: </label>978-3-540-34613-5 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Circuits and Systems; Electronics and Microelectronics, Instrumentation; Mechanics