| 000 | 00553nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 231217s9999 xx 000 0 und d | ||
| 020 | _a0-8247-9951-8 | ||
| 041 | _aEnglish | ||
| 082 | _a621.38152 NON;1 R | ||
| 100 | _aNonogaki, Saburo Ueno, Takumi Ito, Toshio | ||
| 245 | 0 | _aMicrolithography fundamentals in semiconductor devices and fabrication technology | |
| 260 |
_c1998 _bMarcel _aNew York |
||
| 300 | _aV+327 | ||
| 500 | _aContent page available | ||
| 650 | _aMicrolithography,semiconductor,devices,fabrication,technology | ||
| 942 | _cAA | ||
| 999 |
_c177518 _d177518 |
||