| 000 | 00630nam a2200169Ia 4500 | ||
|---|---|---|---|
| 005 | 20250521142509.0 | ||
| 008 | 231217s9999 xx 000 0 und d | ||
| 020 | _a9781420055115 | ||
| 082 | _a621.38152 MAD.1;1 R | ||
| 100 | _aMadou, Marc J. | ||
| 245 | 0 | _aFundamentals of microfabrication and nanotechnology Vol-I : solid state physics fluidics and analytical techniques in micro and nanotechnology | |
| 250 | _a3rd ed. | ||
| 260 |
_c2012 _bCRC Press _aBoca Raton |
||
| 300 | _axiii, 641 | ||
| 650 | _amicrofabrication,nanotechnology,Vol-I,solid,physics,fluidics,analytical,techniques,micro,nanotechnology | ||
| 942 | _cAA | ||
| 999 |
_c193097 _d193097 |
||