000 00630nam a2200169Ia 4500
005 20250521142509.0
008 231217s9999 xx 000 0 und d
020 _a9781420055115
082 _a621.38152 MAD.1;1 R
100 _aMadou, Marc J.
245 0 _aFundamentals of microfabrication and nanotechnology Vol-I : solid state physics fluidics and analytical techniques in micro and nanotechnology
250 _a3rd ed.
260 _c2012
_bCRC Press
_aBoca Raton
300 _axiii, 641
650 _amicrofabrication,nanotechnology,Vol-I,solid,physics,fluidics,analytical,techniques,micro,nanotechnology
942 _cAA
999 _c193097
_d193097