000 00467nam a2200145Ia 4500
008 231221s9999 xx 000 0 und d
020 _a978-0-387-68351-5
041 _aEnglish
100 _aOlav Solgaard
245 0 _aPhotonic Microsystems
260 _c2009
_bSpringer US
_aNew York
440 _aMEMS Reference Shelf
650 _aCircuits and Systems; Optics, Optoelectronics, Plasmonics and Optical Devices; Nanotechnology and Microengineering
942 _cEB
999 _c225691
_d225691