| 000 | 00467nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 231221s9999 xx 000 0 und d | ||
| 020 | _a978-0-387-68351-5 | ||
| 041 | _aEnglish | ||
| 100 | _aOlav Solgaard | ||
| 245 | 0 | _aPhotonic Microsystems | |
| 260 |
_c2009 _bSpringer US _aNew York |
||
| 440 | _aMEMS Reference Shelf | ||
| 650 | _aCircuits and Systems; Optics, Optoelectronics, Plasmonics and Optical Devices; Nanotechnology and Microengineering | ||
| 942 | _cEB | ||
| 999 |
_c225691 _d225691 |
||