000 00559nam a2200145Ia 4500
008 231221s9999 xx 000 0 und d
020 _a978-0-387-76534-1
041 _aEnglish
100 _aChuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif
245 0 _aWafer Level 3-D ICs Process Technology
260 _c2008
_bSpringer US
_aNew York
440 _aIntegrated Circuits and Systems
650 _aElectronics and Microelectronics, Instrumentation; Optical and Electronic Materials; Surfaces and Interfaces, Thin Films; Engineering, general
942 _cEB
999 _c225799
_d225799