| 000 | 00559nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 231221s9999 xx 000 0 und d | ||
| 020 | _a978-0-387-76534-1 | ||
| 041 | _aEnglish | ||
| 100 | _aChuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif | ||
| 245 | 0 | _aWafer Level 3-D ICs Process Technology | |
| 260 |
_c2008 _bSpringer US _aNew York |
||
| 440 | _aIntegrated Circuits and Systems | ||
| 650 | _aElectronics and Microelectronics, Instrumentation; Optical and Electronic Materials; Surfaces and Interfaces, Thin Films; Engineering, general | ||
| 942 | _cEB | ||
| 999 |
_c225799 _d225799 |
||