| 000 | 00496nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 231221s9999 xx 000 0 und d | ||
| 020 | _a978-0-387-77747-4 | ||
| 041 | _aEnglish | ||
| 100 | _aJeffrey Lang | ||
| 245 | 0 | _aMulti-Wafer Rotating MEMS Machines | |
| 260 |
_c2010 _bSpringer US _aNew York |
||
| 440 | _aMEMS Reference Shelf | ||
| 650 | _aElectronics and Microelectronics, Instrumentation; Energy Technology; Circuits and Systems; Electrical Engineering; Energy, general | ||
| 942 | _cEB | ||
| 999 |
_c225812 _d225812 |
||