000 00491nam a2200145Ia 4500
008 231221s9999 xx 000 0 und d
020 _a978-1-4419-8825-6
041 _aEnglish
100 _aTom Proulx
245 0 _aMEMS and Nanotechnology, Volume 2
260 _c2011
_bSpringer New York
_aNew York
440 _aConference Proceedings of the Society for Experimental Mechanics Series
650 _aTheoretical and Applied Mechanics; Mechanics; Materials Science, general
942 _cEB
999 _c226566
_d226566