000 00546nam a2200145Ia 4500
008 231221s9999 xx 000 0 und d
020 _a978-1-4614-4436-7
041 _aEnglish
100 _aGordon A. Shaw, Barton C. Prorok, LaVern A. Starman
245 0 _aMEMS and Nanotechnology, Volume 6
260 _c2013
_bSpringer New York
_aNew York
440 _aConference Proceedings of the Society for Experimental Mechanics Series
650 _aNanotechnology and Microengineering; Theoretical and Applied Mechanics; Nanotechnology
942 _cEB
999 _c227037
_d227037