| 000 | 00546nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 231221s9999 xx 000 0 und d | ||
| 020 | _a978-1-4614-4436-7 | ||
| 041 | _aEnglish | ||
| 100 | _aGordon A. Shaw, Barton C. Prorok, LaVern A. Starman | ||
| 245 | 0 | _aMEMS and Nanotechnology, Volume 6 | |
| 260 |
_c2013 _bSpringer New York _aNew York |
||
| 440 | _aConference Proceedings of the Society for Experimental Mechanics Series | ||
| 650 | _aNanotechnology and Microengineering; Theoretical and Applied Mechanics; Nanotechnology | ||
| 942 | _cEB | ||
| 999 |
_c227037 _d227037 |
||