000 00477nam a2200133Ia 4500
008 231221s9999 xx 000 0 und d
020 _a978-3-211-72861-1
041 _aEnglish
100 _aTibor Grasser, Siegfried Selberherr
245 0 _aSimulation of Semiconductor Processes and Devices 2007
260 _c2007
_bSpringer Vienna
_aNew York
650 _aElectronics and Microelectronics, Instrumentation; Computational Intelligence; Simulation and Modeling
942 _cEB
999 _c227531
_d227531