Normal view MARC view ISBD view

Microlithography fundamentals in semiconductor devices and fabrication technology

Nonogaki, Saburo Ueno, Takumi Ito, Toshio

Microlithography fundamentals in semiconductor devices and fabrication technology - New York Marcel 1998 - V+327

Content page available

ISBN: 0-8247-9951-8

Subjects--Topical Terms:
Microlithography,semiconductor,devices,fabrication,technology

Dewey Class. No.: 621.38152 NON;1 R

Place hold
Print
Cite
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)