Microlithography fundamentals in semiconductor devices and fabrication technology (Record no. 177518)

MARC details
000 -LEADER
fixed length control field 00553nam a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 231217s9999 xx 000 0 und d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0-8247-9951-8
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title English
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152 NON;1 R
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Nonogaki, Saburo Ueno, Takumi Ito, Toshio
245 #0 - TITLE STATEMENT
Title Microlithography fundamentals in semiconductor devices and fabrication technology
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Date of publication, distribution, etc. 1998
Name of publisher, distributor, etc. Marcel
Place of publication, distribution, etc. New York
300 ## - PHYSICAL DESCRIPTION
Extent V+327
500 ## - GENERAL NOTE
General note Content page available
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography,semiconductor,devices,fabrication,technology
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Holdings
Date last seen Total checkouts Full call number Accession number Uniform resource identifier Cost, total (INR) price Price effective from Category Lost status Damaged status Department Withdrawn status Home library Current library Shelving location Entry date Vendor Cost, normal purchase price Grants Billnumber Billdate Currency symbol Conversion rate Discount Old discount
26/01/2024   621.38152 NON;1 R 41514 digital/contents/41514.pdf 5685.60 26/01/2024 Books     Central Library   Central Library Central Library Central Library 15/05/2006 I K International 92.00 ME/PG 1659 06/01/2006 POUND 82.4 23 25

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